A 19 GHz Lithium Niobate Acoustic Filter with FBW of 2.4%
2020 IEEE/MTT-S International Microwave Symposium (IMS)(2020)
Abstract
This paper presents the first demonstration of a wideband hybrid monolithic acoustic filter in the K-band which exceeds the limitation of electromechanical coupling on the fractional bandwidth (FBW) of acoustic filters. The hybrid filter utilizes the co-design of EM and acoustic to attain wide bandwidth while keeping the advantages of small sizes and high Q in the acoustic domain. The fabricated filter built with resonators having an electromechanical coupling of 0.7% based on the seventh-order antisymmetric Lamb wave mode (A7) has a 3 dB FBW of 2.4% at 19 GHz, and a compact footprint of 1.4 mm(2).
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Key words
Microelectromechanical systems,millimeter-wave devices,piezoelectric devices,K-band
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