The Design and Optimization of Inherent Frequency of Combined Triaxial High-g Accelerometer

The triaxial high-g accelerometer provides an effective solution to the accurate explosion positioning of the penetration weapon. The combined design type is the mainstream of the triaxial high-g accelerometer. Based on MEMS technology, the accelerometer has advantages of small volume and light quality. The combined structure determines that the overall stability of the accelerometer is influenced by every single chip. In order to improve the natural frequency of the chip and avoid the occurrence of resonance, an optimization method of the membrane-island structure, combined with mechanics of elasticity, is proposed in this paper. The optimization method is validated by finite element analysis and high shock calibration experiment. The rationality of the combined structure of the accelerometer is validated at the same time.