Time-Domain Analysis of a Novel Co-Resonant Cantilever MEMS Sensor and Derivation of a New Measurement Concept Based on Beating
Journal of Microelectromechanical Systems（2020）
关键词
Oscillators,Time-frequency analysis,Time-domain analysis,Analytical models,Resonant frequency,Force,Circuit modelling,microsensors,mechanical sensors,modelling nanosensors,time-domain analysis
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