Wafer-Level Vacuum-Packaged Translatory MEMS Actuator with Large Stroke for NIR-FT Spectrometers

Thilo Sandner,Eric Gaumont,Thomas Grasshoff, Andreas Rieck,Tobias Seifert,Gerald Auboeck,Jan Grahmann

Micromachines（2020）

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关键词

micro-opto-electro-mechanical system (MOEMS),translatory micro mirror,optical wafer-level vacuum package (WLVP),NIR Fourier-transform spectrometer,glass-frit wafer bonding

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