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反应等离子喷涂纳米TiN涂层的显微硬度及微观结构研究

Wen-Ran Feng,Dian-Ran Yan,Ji-Ning He,Guang-Liang Chen,Wei-Chao Gu,Gu-Ling Zhang,Chi-Zi Liu,Si-Ze Yang

ACTA PHYSICA SINICA（2005）

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Abstract
阐述了反应等离子喷涂(RPS)方法的基本思想.利用气体隧道等离子喷枪,通过RPS方法在Q235钢基底上成功制备了氮化钛涂层.检测了TiN涂层在不同载荷下的显微硬度,结果显示TiN涂层具有明显的硬度压痕尺寸效应,在高载荷下加工硬化效应较弱.XRD,TEM及HRTEM等分析表明,通过BPS方法制备得到了纳米TiN涂层,涂层由直径约为50-70 nm的TiN晶粒及非晶TiN所组成.
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Key words
RPS,nanometer,TiN,microstructure
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