Wre26-In2o3 Probe-Type Thin Film Thermocouples Applied To High Temperature Measurement
REVIEW OF SCIENTIFIC INSTRUMENTS(2020)
Abstract
A novel probe-type thin film thermocouple has been fabricated successfully for high temperature measurement applications. WRe26 (tungsten-26% rhenium)-In2O3 thermoelectric materials were used in the thermocouples to achieve high thermoelectric output and high temperature resistance. The films were deposited on a cylindrical substrate by magnetron sputtering technology. The annealing process of the thermocouples was studied to achieve optimal performance. The calibration results showed the thermoelectric output of WRe26-In2O3 thin film thermocouples reached 93.7 mv at 700 degrees C, and its sensitivity was 165.5 mu V/degrees C under the temperature of the cold junction, which was 133.8 degrees C. The thermocouples developed in this work have great potential for practical applications.
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Key words
Thin Film Thermocouples,Metal-Embedded Thermocouples,High Temperature Sensors,Thermometry,Transient Temperature Measurement
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