III-N/Si₃N₄ Integrated Photonics Platform for Blue Wavelengths
IEEE Journal of Quantum Electronics(2020)
摘要
In this paper, we report a low-loss photonic integrated circuits (PICs) platform at blue wavelengths of the visible spectral regime. Silicon nitride (SiN) is a popular passive waveguide material due to its fabrication flexibility, CMOS compatibility and spectral transparency in this wavelength regime. For active devices including lasers, gallium nitride (GaN) and its alloys are considered. Several...
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关键词
Silicon compounds,Waveguide lasers,Couplings,Couplers,Optical fiber couplers
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