Magnesium composition effect on UV-sensing performance of Mg x Zn 1− x O-based solidly mounted bulk acoustic resonator

Yijian Liu, Siyuan Luo,Xun Sun,Yaozhong Zhang,Xiaofeng Zhu,Huey-liang Hwang,Zhongli Li,Yafei Zhang

Journal of Materials Science: Materials in Electronics（2020）

引用 4|浏览45

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摘要

Magnesium-doped zinc oxide (Mg x Zn 1− x O) is a ternary compound formed by alloying ZnO and MgO. A series of Mg-doped ZnO-based solidly mounted resonators (SMRs) with a lateral co-planar electrode was fabricated by radio-frequency magnetron sputtering PVD deposition for UV-sensing application in this report. The SMRs were developed with 4 levels tuning Mg composition from 0 to 25

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