Absolute three-dimensional micro surface profile measurement based on a Greenough-type stereomicroscope

Fringe projection profilometry has become a widely used method in 3D shape measurement and 3D data acquisition for the features of flexibility, noncontactness, and high accuracy. By combining fringe projection setup with microscopic optics, the fringe pattern can be projected and imaged within a small area, making it possible for measuring 3D surfaces of micro-components. In this paper, a Greenough-type stereomicroscope arrangement is firstly applied for this situation by using the two totally separated and coaxial optical paths of the stereomicroscope. The calibration framework of the stereomicroscope-based system is proposed, which enables high-accuracy calibration of the optical setup for quantitative measurement with the effect of lens distortion eliminated. In the process of 3D reconstruction, depth information is firstly retrieved through the phase-height relation calibrated by a nonlinear fitting algorithm, and the transverse position can be subsequently obtained by solving the equations derived from the calibrated model of the camera. Experiments of both calibration and measurements are conducted and the results reveal that our system is capable of conducting fully automated 3D measurements with a depth accuracy of approximately 4 μm in a volume of approximately 8(L) mm × 6(W) mm × 3(H) mm.