Correlated 3d imaging of dislocations: insight into the onset of thermal slip in semiconductor wafers
semanticscholar（2017）
Abstract
1 Karlsruhe Institute of Technology (KIT), Institute for Photon Science and Synchrotron Radiation (IPS/ANKA), 76344 Eggenstein, Germany 2 Karlsruhe Institute of Technology (KIT), Laboratory for Applications of Synchrotron Radiation (LAS), 76344 Eggenstein, Germany 3 University Freiburg, Crystallography, Institute for Geosciences, 79104 Freiburg, Germany 4 European Synchrotron Radiation Facility (ESRF), F-38043 Grenoble, France
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