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Smart Nanostructured Silicon <100> and Polysilicon Diaphragm Response for Pressure Sensing Applications using IntelliSuite – A New Approach

M. Alagappan,N. Meenakshi Sundaram, K. Sripadaraja, Kandaswamy

semanticscholar（2015）

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Article history: Received 12 November 2014 Received in revised form 26 December 2014 Accepted 29 January 2015 Available online 10 February 2015
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