An Embedded 65 nm CMOS Remote Temperature Sensor With Digital Beta Correction and Series Resistance Cancellation Achieving an Inaccuracy of 0.4$^{\circ}$C (3$\sigma$ )

An embedded remote junction temperature sensor (RTS) with an inaccuracy of 0.4°C (3σ) for temperature range from -40 °C to 130 °C is presented. Using a digital beta compensation technique, series resistance cancellation and global offset and noise coupling cancellation, the sensor is capable of handling a variety of remote BJTs which are either directly mounted on a PCB or embedded in SoCs. It can accommodate a series resistance of more than 500 Ω and beta values down to around 1.5. The RTS has been integrated with a microcontroller core implemented in a 65 nm digital CMOS process. It shares an external reference voltage source with other data converters on the SoC. Measured results from a set of 16 samples and four BJTs are presented.