A Ladder Transmission Line Model for the Extraction of Ultralow Specific Contact Resistivity—Part II: Experimental Verification

In the first part of this two-part article, a ladder transmission line model (LTLM), featuring elimination of parasitic metal resistances and high accuracy for extracting specific contact resistivity $\rho _{\text {c}}$ , is developed and verified by simulation. In Part II, the LTLM is applied experimentally to Ni contacts formed on the heavily Ga-doped Ge0.95Sn0.05 film. Two types of Ni/p+-Ge0.9...