A Built-In Self-Test Method For MEMS Piezoresistive Sensor

Nowadays, MEMS testing has become a growing problem because it usually needs specific and sophisticated testing equipment and is very time-consuming. To solve this problem, this paper proposes a Built-In Self-Test (BIST) method for membrane MEMS piezoresistive sensor. With the proposed method, an on-chip electric signal can be used as the test stimuli, and process defects of piezoresistive sensor can be diagnosed by analyzing the output response of piezoresistive sensor on chip. The simulation shows that the proposed MEMS BIST scheme can effectively replace the physical testing stimuli with electric signal, thus reduce the dependence on external signal sources and the cost of manufacturing devices.