Micromachined Rate-Integrating Gyroscopes: Concept, Asymmetry Error Sources And Phenomena

Rate-integrating gyroscope (RIG) operation is an attractive operation scheme for micro gyroscopes, because it can provide direct angle measurement and a high dynamic range. However, its zero rate output (ZRO) has a severe drift issue. This work compared the difference between rate and rate-integrating gyroscope operations, and further modeled the gyroscope with asymmetric error terms. Then the influences of these non-ideal factors were analyzed to abridge the ZRO drift phenomena and the sources. The numerical verification proved the theory that such an oscillation pattern is caused by the stiffness mismatch, and decaying to X/Y axis manner resulted from the damping errors. The conclusions can contribute to aiding engineers to rapidly locate the bottlenecks of RIG operations.