Vastly Enhanced Photoresponsivities of Phase-Controlled Tin Sulfide Thin Films.
NANOTECHNOLOGY(2020)
摘要
Herein, we reveal extraordinary enhancements in the photoresponsivities of tin sulfide (SnxSy) grown on SiO2/Si wafers through post-phase transformations induced by electron beam irradiation (EBI) and crystallization. Amorphous Sn(x)S(y)thin films were formed by room-temperature sputtering, and as-deposited films were subsequently transformed into hexagonal SnS(2)and orthorhombic SnS phases by EBI at 600 and 800 V respectively, for only one minute. The use of a low-energy electron beam was sufficient to fabricate a Sn(x)S(y)photodetector, with no additional heating required. Less than 10 nm thick Sn(x)S(y)films with well-defined layer structures and stable surface morphologies were obtained through EBI at 600 and 800 V. The resulting phase-controlled SnS thin-film photodetector prepared using 800 V-EBI exhibited a 40 000-fold increase in photoresponsivity; when illuminated by a 450 nm light source, the active SnS-layer-containing photodetector demonstrated a photoresponsivity of 33.2 mA W-1.
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关键词
electron beam irradiation (EBI),phase transformation,photodetector,tin sulfides (SnxSy),transition metal dichalcogenide (TMD)
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