Erbium implanted silicon for solid-state quantum technologies

Quantum technology (QT) platforms with telecommunications and integrated circuit (IC) processing compatibility have important implications for the long-distance transfer of quantum information, and QT platforms based on ion implantation are inherently scalable. Here we establish the potential of Er implanted Si as a scalable QT platform with telecommunications and IC processing compatibility through coherence and superconducting resonator coupling measurements. The electron spin coherence time of Er implanted Si with an Er concentration of 3x10^17 cm-3 is ~10 us at 5 K. The spin echo decay profile displays strong modulation due to super-hyperfine interaction with 29Si nuclei beyond the first coordination sphere; this interaction could be utilised for the telecommunications wavelength addressing of 29Si qubits. The collective coupling strength between a superconducting NbN lumped-element microresonator and Er implanted Si with an Er concentration of 10^17 cm-3 at 20 mK was ~ 1MHz.