Torsional Mems Magnetometer With Vertically Staggered Combs For In-Plane Magnetic Field Sensing

This paper presents a Torsional MEMS Magnetometer with vertically staggered combs to sense in-plane magnetic fields. Utilizing torsion-resonant mode, it has been designed and fabricated for the in-plane MEMS magnetometer, which consists of one torsional frame, two layers of metal coils and staggered comb structures. As for the design, it has been employed for the comb driving to enhance torsional resonator Q-factors. In terms of fabrications, a simplified fabrication strategy of vertically staggered combs has been achieved on a monolithic wafer. Generally, featured with quasi-zero consumption (78 nW) and excellent non-linear error (0.38%), the proposed MEMS magnetometer with high sensitivity (468 mV/mT) and resolution (6 mu T) has extensive application prospects in automotive electronics and portable devices.