Surface enhanced Raman scattering on ion-beam-deposited TiNx/Si substrates

Shujun Zhao,Yue Zhao,Yujing Ran,Huiping Lu,Qian Guo,Chang Gao,Yanfeng Zhao,Wenjie Yan,Zhaotan Jiang,Hanchun Wu,Duan Zhang,Zhi Wang

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms（2020）

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摘要

•SERS performance of the ion-beam-deposited TiNx films substrates was investigated.•The SERS performance is sensitive to the thickness of TiNx layer.•The ion-bombardment contributes to the SERS effect of the TiNx/Si substrate.•Suitable ion current and energy can improve the SERS performance to several times.

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关键词

Surface enhanced Raman scattering,Titanium nitride,Assisting ions,Localized field

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