Micropatterning and Integration of Electrospun PVDF Membrane Into Microdevice

Journal of Microelectromechanical Systems(2020)

引用 4|浏览33
暂无评分
摘要
This article reports a novel work on the fabrication of microarrays of electrospun Poly(vinylidene fluoride) (PVDF) membrane for MEMS and energy harvesting applications. Micropatterning of PVDF membrane is an essential step in fabrication process in order for the sample to be integrated in microelectromechanical systems. The high β-phase fraction of PVDF membranes was successfully synthesized by o...
更多
查看译文
关键词
Etching,Fabrication,Polymers,Temperature sensors,Plasmas,Substrates
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要