Molecular Electronic Transducer Based Tilting Sensors
2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020)(2020)
Abstract
This paper introduces a tilting sensor based on Molecular Electronic Transducer (MET) technology. By applying electrical potential between two electrodes covered by lithium iodide electrolyte, the output current from the sensor reflects the covered area of electrodes. The continuously change of electrode area with tilting angle is achieved by patterning metal traces on top of a SiO2 encapsulated silicon wafer. Polydimethylsiloxane (PDMS) is used as the electrolyte chamber which has high bond strength with SiO2 after the surface treatment with O-2 plasma. The MET tilting sensor achieves a promising performance with a linear range of +/- 90 degrees, resolution of 0.184 degrees and time constant of 40s.
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Key words
Molecular Electronic Transducer, Tilt Sensor, PDMS
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