Bottom-up fabrication of special parylene films based on selective growth on Au-coated surface

Yi Zhou, Fei Ding, Chao Ni, Wei Wang, Wengang Wu

Shenzhen（2009）

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摘要

In this paper, we present a method for fabricating parylene films with different features. It has been reported that transitional metals, such as Au, have an inhibitive effect on the growth of parylene. By utilizing this property, we deposit parylene on different Au-coated surface and achieve special parylene films, including polycrystalline-like film and ldquonano-hillrdquo film. We have taken some experiment on hydrophilicity to evaluate the roughness of the ldquonano-hillrdquo film. The characteristics of the special films might enable innovative applications of parylene films.

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关键词

different au-coated surface,film roughness,bottom-up fabrication,surface roughness,transitional metals,parylene,deposit parylene,parylene films,selective growth,hydrophilicity,roughness,special parylene film,polymer films,nanohill film,parylene film,innovative application,polycrystalline-like film,inhibitive effect,transitional metal,different feature,special film,inhibitors,rough surfaces,films,polymers,fabrication,transition metal,gold,bottom up

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