Spectroscopic Study Of Tiox Film For Novel N-Type Semiconductor/Insulator/P-Type Semiconductor Rechargeable Device

We have demonstrated a novel semiconductor rechargeable battery (capacitor-like device), which uses electrons, holes and no mobile ions, having a TiOx/SiNy/NiOz laminated structure with a capacity 5000 times larger than that of a conventional parallel plate capacitor. In this study, photoluminescence, cathodoluminescence and Raman spectroscopy of TiOx (x = 1.92, 2.00 and 2.04) films were carried out. We showed some correlations between these spectroscopic characteristics of TiOx having different oxygen compositions and the capacitor performance of a TiOx/SiNy/NiOz laminated structure. (C) The Author(s) 2020. Published by ECSJ.