Propagation Properties Of Leaky Surface Acoustic Wave On Water-Loaded Litao3/Quartz Bonded Structure

JAPANESE JOURNAL OF APPLIED PHYSICS(2020)

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Abstract
Recently, bonded structures such as LiTaO3/quartz structures have been attracting attention as a means of obtaining high-performance surface acoustic wave (SAW) devices. To investigate the possibility of evaluating the acoustical loss in such bonded structures by subtracting the calculated leakage loss into the water from the measured normalized attenuation factor, propagation properties such as the velocity and normalized attenuation factor of leaky SAWs on a water-loaded 36 degrees YX-LiTaO3/AT0 degrees X-quartz bonded structure were investigated using a line-focus-beam ultrasonic material characterization system and were found to be in good agreement with the calculated values for both the 0 degrees X and 90 degrees X propagation directions. (C) 2020 The Japan Society of Applied Physics.
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Key words
acoustic wave,leaky surface,litao<sub>3</sub>/quartz,water-loaded
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