Optimization of Nafion Polymer Electrolyte Membrane Design and Microfabrication
IEEE Transactions on Semiconductor Manufacturing(2020)
摘要
Nafion is a solid electrolyte polymer that can be used as a sensor membrane in microfabricated electrochemical oxygen sensors. It allows ions to be transported between the sensor electrodes and removes the need for a liquid electrolyte. Here we used a series of small square Nafion test structures, fabricated on a variety of materials using standard thin-film patterning techniques, to optimize the ...
更多查看译文
关键词
Adhesives,Electrodes,Layout,Resists,Electrolytes,Semiconductor device measurement,Polymers
AI 理解论文
溯源树
样例
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要