Optimization of Nafion Polymer Electrolyte Membrane Design and Microfabrication

IEEE Transactions on Semiconductor Manufacturing(2020)

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摘要
Nafion is a solid electrolyte polymer that can be used as a sensor membrane in microfabricated electrochemical oxygen sensors. It allows ions to be transported between the sensor electrodes and removes the need for a liquid electrolyte. Here we used a series of small square Nafion test structures, fabricated on a variety of materials using standard thin-film patterning techniques, to optimize the ...
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关键词
Adhesives,Electrodes,Layout,Resists,Electrolytes,Semiconductor device measurement,Polymers
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