Beryllium-Based Multilayer Mirrors for the Soft X-Ray and Extreme Ultraviolet Wavelength Ranges

Yu. A. Vainer,S. A. Garakhin,S. Yu. Zuev,A. N. Nechay, R. S. Pleshkov,V. N. Polkovnikov,N. N. Salashchenko,M. V. Svechnikov,M. G. Sertsu,R. M. Smertin,A. Sokolov,N. I. Chkhalo,F. Schäfers

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques（2020）

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摘要

— The latest experimental results of studying beryllium-containing multilayer mirrors are reviewed. The mirrors are of interest for projection nanolithography, solar astronomy, X-ray microscopy, and other applications. It is shown that for a number of ranges beryllium-containing multilayer mirrors outperform the world analogues in their X-ray optical characteristics.

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关键词

X-ray radiation, multilayer mirrors, magnetron sputtering

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