Impact of Technological Operations Parameters on Moems Components Formation

Oleksandr Filipenko,Olena Chala,Viktoriia Bortnikova,Oksana Sychova,Iryna Botsman

2019 IEEE 8th International Conference on Advanced Optoelectronics and Lasers (CAOL)（2019）

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摘要

In the paper the modeling results for the process of MOEMS functional surfaces shaping are presented. The significance and magnitude of factors that directly affect the shaping process of MOEMS functional surfaces were determined.

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关键词

component,MOEMS,shaping,optical switcher,micro mirror,grinding,polishing.

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