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A CMOS Compatible Monolithic Fiber Attach Solution with Reliable Performance and Self-alignment

Bo Peng,Tymon Barwicz,Asli Sahin,Thomas Houghton,Brittany Hedrick,Yusheng Bian,Michal Rakowski,Shuren Hu,Javier Ayala,Colleen Meagher,Zoey Sowinski,Karen Nummy,Andy Stricker,Jorge Lubguban,Hui Chen,Benjamin Fasano,Ian Melville,Zhuo-jie Wu,Jae Kyu Cho,Ajey Jacob,Dave Riggs,Daniel Berger,Ted Letavic,Anthony Yu,John Pellerin,Ken Giewont

OFC（2020）

Cited 10|Views40
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Abstract
We report a fiber-attach solution interfacing self-aligned, standard-cleaved fibers to monolithic photonic integrated circuits, fabricated in Globalfoundries 300-mm CMOS production facilities. Statistical yield analysis and reliability assessment were performed to demonstrate the robustness of the proposed solution.
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Key words
monolithic photonic integrated circuits,reliability assessment,CMOS compatible monolithic fiber attach solution,Globalfoundries CMOS production facilities,fiber-attach solution interfacing self-aligned standard-cleaved fibers
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