A CMOS Compatible Monolithic Fiber Attach Solution with Reliable Performance and Self-alignment
OFC(2020)
Abstract
We report a fiber-attach solution interfacing self-aligned, standard-cleaved fibers to monolithic photonic integrated circuits, fabricated in Globalfoundries 300-mm CMOS production facilities. Statistical yield analysis and reliability assessment were performed to demonstrate the robustness of the proposed solution.
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Key words
monolithic photonic integrated circuits,reliability assessment,CMOS compatible monolithic fiber attach solution,Globalfoundries CMOS production facilities,fiber-attach solution interfacing self-aligned standard-cleaved fibers
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