Simulations of negative ion extraction and transport for developing novel remote reactive ion processing system

A novel remote dry processing of specific reactive negative ions with a deflection and focusing system is being developed to precisely control their energy, flux and reaching position on the nanoscale. The trajectory simulations of the negative ion extraction and transport for the design of this processing apparatus have been carried out using SIMION software. It is found from the simulation results that the ion beams with good focusing characteristics, high directivity and appropriate current amount can be successfully extracted from the plasma source and transported to the reactor chamber through the deflection and focusing system. The simulation results of O- ion beam exhibit that the extraction and transport characteristics of the flat intermediate electrode are superior to those of the oblique one. (C) 2020 The Japan Society of Applied Physics