Non-quarter-wave dielectric mirror prepared by thermal atomic layer deposition

J. Lopez,H. Márquez, H. Borbón Nuñez,N. Abundiz,R. Machorro,M.H. Farías,O.E. Contreras,H. Tiznado,G. Soto

Optics & Laser Technology（2020）

引用 3|浏览33

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摘要

•Non-quarter-wave dielectric mirror based on multilayer stack.•TiO2 – Al2O3 dielectric mirror was fabricated via thermal atomic layer deposition.•Dielectric mirror with reject zone for λ0 = 420 nm as reference wavelength.•Results reported opens the possibility to develop non-quarter-wave optical coatings.

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关键词

Optical coating,Multilayer stack,Dielectric mirror,Atomic layer deposition

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