FeZrN films: Role of dc magnetron sputtering conditions in the formation of their elemental and phase compositions

E.N. Sheftel,V.A. Tedzhetov,E.V. Harin,G.Sh. Usmanova, A.L. Dyachkov

Thin Solid Films（2020）

引用 5|浏览4

暂无评分

摘要

•FeN, FeZr, and FeZrN films, deposited by magnetron sputtering, have been studied.•Impurity elements (O and N) participate in the formation of the films phase state.•Mixed structure, containing nanocrystalline and amorphous phases, is revealed.•Supersaturated body-centered cubic Fe(N) and Fe(Zr) solid solutions are formed.•Kinetics determines the formation of the Fe–N/O alloying system phases in the films.

查看译文

关键词

Fe–Zr–N films,Magnetron sputtering,Magnetic materials,Nanocrystalline materials,X-ray diffraction,Impurity elements,Phase composition,αFe-based solid solution

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要