In-situ study of platinum reaction with oxygen contaminated silicon layer

Z.M. Khumalo,M. Topić,M. Blumenthal,C.B. Mtshali,M.J. Madito,N. Mongwaketsi,K. Cloete,M. Nkosi

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms（2020）

引用 1|浏览5

暂无评分

摘要

•The multi-layered structure was prepared using electron beam evaporation (EBE).•Silicide grow uninterrupted upon Pt reaction with O-contaminated silicon layer.•Friendly approach applicable in the core-shell silicon nanowire contact structure.•Avoiding the use of hazardous acids during device fabrication.

查看译文

关键词

Silicide,In-situ RBS,X-ray diffraction,XPS

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要