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A 4-view imaging to reveal microstructural differences in obliquely sputter-deposited tungsten films

Raya El Beainou,Aurelio Garcia-Valenzuela,Marina Raschetti,Jean-Marc Cote,Rafael Alvarez,Alberto Palmero,Valérie Potin,Nicolas Martin

Materials Letters（2020）

Cited 13|Views18
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Abstract
•We examine the difference of morphology in tilted columnar W films.•Columns are composed of a dense microstructure in front of the W particle flux.•A fibrous and bundled feature appears in the shadowing zone of the columns.•These morphological disparities are connected to the energy transfer of W atoms to the column apex.
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Key words
Oblique angle deposition,W thin films,Tilted columns,Dense,Fibrous morphology
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