Self-organized fractal-like structures formation on the silicon wafer surface using the femtosecond laser pulses

•Femtosecond laser processing of silicon wafer is experimentally studied.•Formation of self-organized structure by using different pulse number and laser fluence is investigated.•A novel method for creation of combined micro and nano self-organized structures is developed.•Formation of the fractal-like structure in the femtosecond pulse laser processing is established.