Edge-coupling of O-Band InP etched-facet lasers to polymer waveguides on SOI by micro-transfer-printing

O-band InP etched facets lasers were heterogeneously integrated by micro-transfer-printing into a 1.54 μm deep recess created in the 3 μm thick oxide layer of a 220 nm SOI wafer. A 7 × 1.5 μm2 cross-section, 2 mm long multimode polymer waveguide was aligned to the ridge post-integration by e-beam lithography with <; 0.7 μm lateral misalignment and incorporated a tapered silicon waveguide. A 170 nm...