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Design of Vision Assistant System for an Atomic Force Microscopy Based on Object Detection

2019 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)(2019)

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Abstract
This paper designs a vision assistant system for an atomic force microscopy based on object detection. The system includes a visual interface, a focus assessment subsystem, a function that evaluates the uniformity of the object distribution and an object detection subsystem. A visual interface can provide researchers a convenient way to obtain the area of interest. Afterwards, the sharpest image in the region of interest can be obtained by the automatic focus of the focus assessment subsystem. Furthermore, the object distribution uniformity function is proposed to find an optimal region with uniform object distribution. Based on the above modules, the object detection algorithm is proposed to detect and locate the objects, which provides reliable visual assistant for the imaging and manipulation of an atomic force microscopy. Experimental results are exhibited to illustrate the good performance and the satisfactory robustness of the system.
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Key words
atomic force microscopy,optical microscopy,focus assessment,object distribution evaluation,object detection
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