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Direct Integration of Carbon Nanotubes in CMOS, Towards an Industrially Feasible Process: A Review

Knut E. Aasmundtveit,Avisek Roy,Bao Q. Ta

IEEE Transactions on Nanotechnology（2020）

Cited 3|Views18
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Abstract
This article reviews our work on direct integration of carbon nanotubes (CNTs) in MEMS vehicles and shows initial results in realizing direct CNT integration in CMOS. Extraordinary properties of CNTs are fully exploited if they are closely integrated with signal processing electronics. An example device is a CNT-based gas sensor, where CNTs with their huge surface-to-volume ratio act as a very sen...
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Temperature measurement,Micromechanical devices,Heating systems,Resistance,Electrodes,Silicon,Photomicrography
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