Analysis of damage curing in a MOSFET with joule heat generated by forward junction current at the source and drain
Microelectronics Reliability(2020)
Abstract
This study demonstrates a method for curing the gate dielectric of a MOSFET using Joule heat (JH) generated by forward bias current in the PN-junction in the drain-to-body (D-B) and source-to-body (SB). To accurately quantify the curing effect by the D-B JH and the SB JH, the interface trap density (Nit) of the gate dielectric was laterally profiled using a charge pumping characterization method. The curing method was applied to repair damage in the gate dielectric caused by Fowler-Nordheim (FN) and hot-carrier injection (HCI) stress. When FN stress was applied to the device, there is no difference in curing the damage by the D-B JH and the SB JH. However, when HCI stress, which asymmetrically causes more damage to the drain, was applied, the D-B JH showed better recovery than the SB JH.
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Key words
Charge pumping (CP),Forward junction current,Fowler-Nordheim (FN),Gate dielectric curing,Hot-carrier injection (HCI),Interface trap,Joule heat,Lateral profiling,Performance parameter,PN-junction,Recovery
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