Atomic Layer Deposition of Tungsten Nitride Films as Protective Barriers to Hydrogen

•Atomic layer deposition of tungsten nitride on zirconia nanopowders was confirmed.•Transfer of electron charge from tungsten stabilizes hydrogen interstitials.•Tungsten nitride decomposes to tungsten and N2 in two steps.•Yttria stabilized zirconia was ALD coated as a proxy for UO2 in thermal testing.•100 tungsten nitride ALD cycles delays hydrogen’s reaction with the substrate.