Surface-orientation control of silicon thin films via aluminum-induced crystallization on monocrystalline cubic substrates

Mel Hainey, Eddie (Chenhui) Zhou, Loic Viguerie,Noritaka Usami

Journal of Crystal Growth(2020)

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摘要
•Aluminum-induced crystallization of Si on single crystal (100) surfaces is shown.•On STO(001), uniform Si(111) film with minimal influence from substrate.•On H-terminated Ge(001), Si(111) formation with minimal influence from Substrate.•On Cl-terminated Ge(001), formation of a (001)-oriented SiGe alloy observed.•Thick AIC-Si films nucleate away from Al/substrate interface, no substrate effects.
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关键词
A1. Interfaces,B2. Semiconducting silicon,A3. Polycrystalline Deposition,B1. Oxides,B2. Semiconducting germanium,A3. Solid phase epitaxy
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