Designing resonance microwave cavities to optimize plasma generation
IEEE Transactions on Instrumentation and Measurement(2020)
摘要
Methodology for designing the 2.45-GHz microwave (MW) coupling system to optimize the hydrogen plasma density in an electron cyclotron resonance (ECR) plasma reactor is presented. Two different plasma generator systems have been studied by experiments and 3-D simulations to find the criteria to reach an optimized design. The experimental work includes the detailed measurements and calculations of ...
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关键词
Plasmas,Couplers,Microwave theory and techniques,Magnetic resonance,Cavity resonators,Microwave measurement,Inductors
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