A novel XYZ micro/nano positioner with an amplifier based on L-shape levers and half-bridge structure

•A piezo-actuated XYZ micro/nano positioner is designed with an novel amplifier based on L-shape levers and half-bridge structure.•The novel concave input mechanism is used for location restriction to reduce the motion coupling caused by the inconsistent central axes of the PEA and input mechanism.•The positioner shows a good input and output decoupling capacity, and the cross-axis coupling ratios are within 0.53 % and 1.56 %, respectively.•The positioner realizes a working range of 128.1 μm × 131.3 μm × 17.9 μm with a high resolution of 8 nm.