Micro Heater With Low Temperature Coefficient Of Resistance For Icf Target

A micro heater with low temperature coefficient of resistance (TCR) at liquid hydrogen temperature was designed and fabricated by micro fabrication technology. The NiCr heater annealed in N-2 at 250 degrees C for 9 min achieves a smallest TCR of 9.36 ppm/K at 20 K. The crystal structures of NiCr film annealed in nitrogen were analyzed by scanning electron microscope (SEM) and X-ray diffraction (XRD). The crystallization of NiCr film improved with the annealing temperature increasing. The fabricated micro heater applied in the temperature control test achieves the accuracy of +/- 0.5 mK, which is qualified for the temperature control accuracy requirement of the ignition target of inertial confinement fusion (ICF).