Ultrasensitive Mass Sensing with a Nanomechanical Transistor.

A novel mass sensor based on the nanomechanical transistor is designed. Based on giving the dynamic structure model, the transfer equations of the coupled mechanical part and the charge part are listed. Their parameters are obtained through experiments, and the dynamic displacement, velocity, and charge shuttle are numerically analyzed. Furthermore, the relationship between current changes of a passive beam with sensed mass is studied, proving the sensor’s capability in detecting a small mass. Ultimately, the simulation results show that in this way can we get a mass sensor with high-quality sensitivity. The sensoru0027s working range is in the 10-21 kilogram(zg) range.