Synthesis of graphene-like carbon film on SiC substrate
Journal of Crystal Growth(2020)
摘要
•Free-standing graphene-like carbon film was synthesized on SiC by CVD.•The carbon film is formed by the carbon atoms which come from ethylene.•The carbon film can be easily exfoliated from the substrate without any residuum.•The sheet resistivity of the sample is as low as 40 Ω/sq.
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关键词
Carbon film,Graphene-like,SiC substrate,CVD,Free-standing,Raman spectra
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