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AlN Overgrowth of Nano-Pillar-patterned Sapphire with Different Offcut Angle by Metalorganic Vapor Phase Epitaxy

S. Walde,S. Hagedorn,P. -M. Coulon,A. Mogilatenko,C. Netzel, J. Weinrich,N. Susilo,E. Ziffer, L. Matiwe,C. Hartmann,G. Kusch,A. Alasmari,G. Naresh-Kumar,C. Trager-Cowan,T. Wernicke,T. Straubinger,M. Bickermann,R. W. Martin,P. A. Shields,M. Kneissl,M. Weyers

JOURNAL OF CRYSTAL GROWTH（2020）

Cited 17|Views50
Key words
Metal organic vapor phase epitaxy,Nitrides,Sapphire,Light emitting diodes
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