Solvent‐free powder synthesis and thin film chemical vapour deposition of a zinc bipyridyl‐triazolate framework

EUROPEAN JOURNAL OF INORGANIC CHEMISTRY(2020)

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摘要
MAF-252, a non-porous crystalline coordination polymer, is obtained from the solvent-free reaction of ZnO with 3-(2-pyridyl)-5-(4-pyridyl)-1,2,4-triazole. MAF-252 can be synthesized in powder form and deposited as thin films, starting from ZnO powder and layers, respectively. Chemical vapor deposition (CVD) of MAF-252 enables conformal and patterned thin films, even on high aspect ratio features.
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关键词
Coordination polymers,Chemical vapor deposition,Thin films,Microfabrication,Solvent-free reactions
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