Optimization of atomic layer deposition temperature of ZrO 2 protective coat for GaInAsP photonic crystal nanolaser sensor

This study examined the effect of atomic layer deposition temperature of a ZrO2 protective coat on GaInAsP semiconductor photonic crystal nanolaser sensors. At low temperatures (around 100 degrees C), the nonradiative centers at the ZrO2/GaInAsP interfaces were reduced, and the laser operation and refractive index sensing characteristics were stabilized. At high temperatures (around 250 degrees C), the nonradiative centers increase, which, in turn, improves the ion sensitivity based on surface recombination. (C) 2019 The Japan Society of Applied Physics