Fabrication of a Metal Roller Mold with Nanoimprinted Pattern Using Thermal Nanoimprint Lithography

In this work, fabrication of a metal roller mold with nanoimprinted pattern was demonstrated. To get metal nanopattern on a metal roller mold, thermal nanoimprint lithography (TNIL) and subsequent electroforming process were conducted. A poly(methyl methacrylate) (PMMA) nanopattern was fabricated by TNIL process using a polydimethylsiloxane (PDMS) soft stamp on a bare PMMA film. An optimal experimental condition of TNIL process was investigated for large area, uniform PMMA nanopatterning. As a result, large area PMMA line patterns with 200 nm linewidth were fabricated by large-area TNIL process. Electroforming process on the PMMA nanopatterned film resulted in nickel (Ni) nanopattern with a linewidth of 200 nm from the PMMA line pattern. A large area (360 mm by 730 mm in width and length) Ni stamp for a roller mold was fabricated by laser cutting and tiling process of the multiple electroformed Ni stamps. We successfully fabricated a Ni roller mold with feature size of 200 nm in linewidth by attaching the large area Ni stamp to the surface of a roller body.