Influence of Beryllium Barrier Layers on the Properties of Mo/Si Multilayer Mirrors

The performance of multilayer Mo/Si mirrors with B 4 C and Be spacers near a wavelength of 13.5 nm has been studied. It has been shown that four-component Mo/Be/Si/B 4 C mirrors outperform Mo/Si and Mo/Si/B 4 C mirrors in reflection coefficient by 2.0 and 1.3%, respectively. In addition, Mo/Si mirrors offer the widest transmission band width at half maximum (Δλ 1/2 = 0.535 nm). An explanation for these findings has been given.